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18/30383935 DC | 3 Dec 2018 | BSI Knowledge
Standard
18/30383935 DC
BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices - Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application
Current
•
Published:
3 Dec 2018
Overview
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References
History
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Product Details
Descriptors
Durability
Sensors
Thin films
Test methods
Semiconductor devices
Electromechanical storage
Environmental testing
Piezoelectric devices
ICS Codes
31.080.01 Semiconductor devices in general
31.080.99 Other semiconductor devices
31.140 Piezoelectric devices
Committee
EPL/47
International relationships
Identical to:
IEC 62047-37 Ed.1.0
ISBN
—
Publisher
BSI