BS ISO 27894:2009 Vacuum technology. Vacuum gauges. Specifications for hot cathode ionization gauges

BS ISO 27894 defines terms relating to hot cathode ionization vacuum gauges. It also specifies which parameters are given by manufacturers, and which measurement uncertainties have to be considered.

a) BS ISO 27894 updates some terms and definitions given in ISO 3529-3:1981.

b) BS ISO 27894 specifies information for suitable laboratories to correctly calibrate vacuum gauges under high and ultra-high vacua, since ionization gauges with hot cathodes are often used as reference standards.

This information consists of the relevant parameters and characteristics suitable for quotation in manufacturers' instructions to users employing ionization gauges for traceable measurement of pressure under high or ultra-high vacua.

c) BS ISO 27894 also lists those uncertainties associated with the measurement of pressure by the ionization gauge, which are known to be significant, and gives guidelines on how to evaluate them. It is possible that the list is not comprehensive for some current or future vacuum gauges.

d) BS ISO 27894 complements ISO/TS 3567 and ISO/TS 27893 when using ionization gauges as reference standards.

Contents of BS ISO 27894:

Foreword

Introduction

1 Scope

2 Normative references

3 Terms and definitions

4 Symbols and abbreviated terms

5 Principle of hot cathode ionization gauge

6 Specifications for hot cathode ionization gauge to be provided by manufacturers

7 Additional (optional) specifications for hot cathode ionization gauge to be provided by manufacturers

8 Influences contributing to the measurement uncertainty with hot cathode ionization gauges

Annex A (informative) Typical Bayard-Alpert gauge with a glass envelope

Annex B (informative) Typical electrical connection of a Bayard-Alpert gauge

Annex C (informative) Problems with ionization gauges

Bibliography

BS ISO 27894:2009

Vacuum technology. Vacuum gauges. Specifications for hot cathode ionization gauges

Current, Under Review

Published:

31 Mar 2010