National foreword

This British Standard is the UK implementation of ISO 19606:2024. It supersedes BS ISO 19606:2017, which is withdrawn.

The UK participation in its preparation was entrusted to Technical Committee RPI/13, Advanced technical ceramics.

A list of organizations represented on this committee can be obtained on request to its committee manager.

Contractual and legal considerations

This publication has been prepared in good faith, however no representation, warranty, assurance or undertaking (express or implied) is or will be made, and no responsibility or liability is or will be accepted by BSI in relation to the adequacy, accuracy, completeness or reasonableness of this publication. All and any such responsibility and liability is expressly disclaimed to the full extent permitted by the law.

This publication is provided as is, and is to be used at the recipient’s own risk.

The recipient is advised to consider seeking professional guidance with respect to its use of this publication.

This publication is not intended to constitute a contract. Users are responsible for its correct application.

Compliance with a British Standard cannot confer immunity from legal obligations.

This British Standard was published under the authority of the Standards Policy and Strategy Committee on 30 November 2024.

Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the different types of ISO document should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).

ISO draws attention to the possibility that the implementation of this document may involve the use of (a) patent(s). ISO takes no position concerning the evidence, validity or applicability of any claimed patent rights in respect thereof. As of the date of publication of this document, ISO had not received notice of (a) patent(s) which may be required to implement this document. However, implementers are cautioned that this may not represent the latest information, which may be obtained from the patent database available at www.iso.org/patents. ISO shall not be held responsible for identifying any or all such patent rights.

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This document was prepared by Technical Committee ISO/TC 206, Fine ceramics.

This second edition cancels and replaces the first edition (ISO 19606:2017), which has been technically revised.

The main changes are as follows:

in Clause 3, ISO 4287 and ISO 4288 have been replaced with ISO 21920‑1‑3;
revision of 6.2 and Clause 3;
symbols have been revised throughout by moving text to subscript;
Annex A changed from normative to informative.

Any feedback or questions on this document should be directed to the user’s national standards body. A complete listing of these bodies can be found at www.iso.org/members.html.

Introduction

Surface roughness measurements of fine ceramic thin films at the nanometre scale by atomic force microscopy is widely applied to quality control and assurance in industries.

One frequently occurring issue in roughness measurements by atomic force microscopy resulting from its scale dependency is the deviation of roughness due to wear of the probe tip or the deviation in the curvature of commercially available probe tips. This makes it difficult to obtain a reliable and reproducible result of the roughness measurement. Therefore, it is highly desirable to standardize a method to evaluate probe tip diameter or curvature radius.

This document covers the evaluation of probe-tip diameter and provides a method to judge the adequateness of a probe tip for use in day-to-day roughness measurements of fine ceramic thin films with a certain arithmetical mean roughness in the range needing the use of atomic force microscopy in production lines or quality assurance processes.

It should be noted that because surface roughness is a scale-dependent metrology parameter, it is unavoidable that the probe-tip evaluation process contains some contradictory procedures, namely the adequateness of the probe tip for a roughness measurement depends on unmeasurable true roughness in a scale of interest.

In this document, the parameters based on roughness profiles are used. The roughness profile is obtained by using a low-pass filter according to ISO 16610‑21. The process to obtain the sampling length, which is identical to cut-off wavelength, is given in ISO 21920‑2. Some different sampling lengths to process a primary profile can be applied to obtain appropriate values of arithmetic mean deviation of a roughness profile, if necessary.

1 Scope

This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, R_a, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, R_sm, in the range of about 0,04 μm to 2,5 μm.

2 Normative references

3 Terms and definitions

4 Test environment

5 Roughness measurement specimens

6 Test apparatus

6.1 Atomic force microscopy system

6.2 Cantilever

6.3 Scanner

6.4 Specimen stage

7 Test apparatus calibration

8 Probe-tip diameter evaluation standard plate

9 Calibration of X-Y and Z scan axes

10 Probe-tip error evaluation

10.1 Outline of probe-tip error evaluation

10.2 Measurements of preliminary R_a and R_sm

10.3 Evaluation of probe-tip diameter

10.4 Evaluation of error in roughness measurements

11 Roughness measurements of specimen

12 Test report

Bibliography

BS ISO 19606:2024

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for surface roughness of fine ceramic films by atomic force microscopy

Current

Published:

30 Nov 2024