Standard

24/30500235 DC

BS EN IEC 62047-53 Semiconductor devices. Micro-electromechanical devices - Part 53. MEMS electrothermal transfer device

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Product Details

Descriptors

Semiconductor manufacture

Semiconductor materials

Semiconductor technology

Electronic equipment and components

Semiconductor devices

ICS Codes

31.080.99 Other semiconductor devices

Committee

EPL/47

International relationships

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ISBN

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Publisher

BSI